ZYGO製品の特許情報


光学
プロファイラー

5,784,164
6,597,460
6,775,006
6,822,745
6,989,905
7,061,623
7,068,376
7,142,311
7,177,029
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,468,799
7,522,288
7,586,620
7,616,323
7,889,355
7,933,025
7,948,637
7,952,724
8,045,175
8,107,085
8,698,891
8,780,334
9,025,162
9,599,534
9,658,129
9,798,130


レーザー
干渉計

6,359,692
6,643,024
6,781,700
6,804,011
6,879,402
6,882,432
6,924,898
6,972,849
6,995,848
7,218,403
7,612,893
7,710,580
7,796,273
7,796,275
7,948,638
7,948,639
8,045,175
9,103,649

変位センサー

5,767,972
5,917,844
5,970,077
6,157,660
6,452,682
6,597,459
6,950,192
6,975,406
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,697,195
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
9,115,975
9,146,093